Concepedia

Tatsuya Takiguchi

TT

4

Publications

299

Citations

4

H-Index

2010

Active since

Affiliations

The University of Osaka(Current)

Tatsuya Takiguchi is an author at The University of Osaka specializing in materials science, engineering, and applied physics.

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Publications per year

2010–2011

4

Publications

4

Plasma assisted polishing of single crystal SiC for obtaining atomically flat strain-free surface

Kazuya Yamamura, Tatsuya Takiguchi, Masaki Ueda et al. · CIRP Annals · 2011 · 204 citations

, , +9

High-Integrity Finishing of 4H-SiC (0001) by Plasma-Assisted Polishing

Kazuya Yamamura, Tatsuya Takiguchi, Masaki Ueda et al. · Advanced materials research · 2010 · 52 citations · Full text

, , +15

Damage-Free Dry Polishing of 4H-SiC Combined with Atmospheric-Pressure Water Vapor Plasma Oxidation

Hui Deng, Tatsuya Takiguchi, Masaki Ueda et al. · Japanese Journal of Applied Physics · 2011 · 30 citations

, , +14

Damage-Free Dry Polishing of 4H-SiC Combined with Atmospheric-Pressure Water Vapor Plasma Oxidation

Hui Deng, Tatsuya Takiguchi, Masaki Ueda et al. · Japanese Journal of Applied Physics · 2011 · 13 citations

, , +14

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