Applied Surface Science · 2020 · 17 citations · 26 references
Natural SciencesMaterials EngineeringMaterials ScienceElectrochemical EngineeringElectrochemistryThin FilmsElectrode MaterialsEtching ProcessesSemiconductor Thin FilmsThin Film EtchingThin-film DepositionThin-film MaterialsAluminum NitrideEpitaxial MaterialsEtch ChemistryEtchingNitride Thin FilmsNitrides Thin FilmsSelective Etching
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Jeffrey Mileham, S. J. Pearton, C. R. Abernathy et al. · Applied Physics Letters · 1995 · 164 citations
Solar-Blind Photodetectors for Harsh Electronics
Dung‐Sheng Tsai, Wei-Cheng Lien, Der‐Hsien Lien et al. · Scientific Reports · 2013 · 143 citations · Full text
Natural Sciences, Electrical Engineering, Materials Science +17
Near-band-edge photoluminescence of wurtzite-type AlN
E. Kuokštis, Jianping Zhang, Q. Fareed et al. · Applied Physics Letters · 2002 · 107 citations