Concepedia

Publication | Closed Access

Pulsed laser annealing for advanced technology nodes: Modeling and calibration

DOI

47

Citations

17

References

2019

Year

Karim Huet, J. Aubin, Pierre-Edouard Raynal, Benoit Curvers, Armand Verstraete, Bobby Lespinasse, Fulvio Mazzamuto, Alberto Sciuto, Salvatore Francesco Lombardo, Antonino La Magna,
Applied Surface Science

References

YearCitations

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