Pulsed laser annealing for advanced technology nodes: Modeling and calibration

Stacked nanosheet gate-all-around transistor to enable scaling beyond FinFET

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Engineering, Electrical Engineering, Microelectronics +15

Measurements of the optical properties of liquid silicon and germanium using nanosecond time-resolved ellipsometry

G. E. Jellison, D. H. Lowndes · Applied Physics Letters · 1987 · 141 citations

Natural Sciences, Materials Science, Physics +17

A phase-field approach to the simulation of the excimer laser annealing process in Si

Antonino La Magna, Paola Alippi, V. Privitera et al. · Journal of Applied Physics · 2004 · 75 citations

Engineering, Materials Engineering, Materials Science +17

Doping of semiconductor devices by Laser Thermal Annealing

Karim Huet, Fulvio Mazzamuto, Toshiyuki Tabata et al. · Materials Science in Semiconductor Processing · 2016 · 64 citations

Engineering, Materials Engineering, Materials Science +14

Optical functions of silicon-germanium alloys determined using spectroscopic ellipsometry

G. E. Jellison, T. E. Haynes, Hubert H. Burke · Optical Materials · 1993 · 55 citations

Natural Sciences, Materials Science, Physics +14