Concepedia

Characteristics of a plasma information variable in phenomenology-based, statistically-tuned virtual metrology to predict silicon dioxide etching depth

Yunchang Jang, Hyun-Joon Roh, Seolhye Park, Sangmin Jeong, Sanywon Ryu, Ji-Won Kwon, Nam‐Kyun Kim, Gon‐Ho Kim

Current Applied Physics · 2019 · 11 citations · 27 references

DOI

Concepts

References

27

An introduction to variable and feature selection

GuyonIsabelle, ElisseeffAndré · Journal of Machine Learning Research · 2003 · 7.9K citations

, , +14

An Introduction to Variable and Feature Selection.

2003 · 6.6K citations

, , +16

A survey on feature selection methods

Girish Chandrashekar, Ferat Sahin · Computers & Electrical Engineering · 2013 · 5.1K citations

, , +12

Mean Absolute Percentage Error for regression models

Arnaud De Myttenaere, Boris Golden, Bénédicte Le Grand et al. · Neurocomputing · 2016 · 1.4K citations · Full text

, , +13

NIST Atomic Spectra Database (version 2.0)

Yuri Ralchenko, Fan-Di Jou, D. E. Kelleher et al. · 1999 · 1.3K citations

, , +12