Hyun-Joon Roh

Enhancement of the Virtual Metrology Performance for Plasma-Assisted Oxide Etching Processes by Using Plasma Information (PI) Parameters

Seolhye Park, Sangmin Jeong, Yunchang Jang et al. · IEEE Transactions on Semiconductor Manufacturing · 2015 · 38 citations

Engineering, Manufacturing Engineering, Physics +17

Development of the Virtual Metrology for the Nitride Thickness in Multi-Layer Plasma-Enhanced Chemical Vapor Deposition Using Plasma-Information Variables

Hyun-Joon Roh, Sangwon Ryu, Yunchang Jang et al. · IEEE Transactions on Semiconductor Manufacturing · 2018 · 37 citations

Natural Sciences, Materials Engineering, Physics +17

Characteristics of a non-Maxwellian electron energy distribution in a low-pressure argon plasma

Seolhye Park, Jae-Myung Choe, Hyun-Joon Roh et al. · Journal of the Korean Physical Society · 2014 · 21 citations

Natural Sciences, Physics, Electromagnetism +12

Determination of electron energy probability function in low-temperature plasmas from current – Voltage characteristics of two Langmuir probes filtered by Savitzky–Golay and Blackman window methods

Hyun-Joon Roh, Nam‐Kyun Kim, Sangwon Ryu et al. · Current Applied Physics · 2015 · 20 citations

Natural Sciences, Physics, Plasma Physics +9

Plasma information-based virtual metrology (PI-VM) and mass production process control

Seolhye Park, Jaegu Seong, Yunchang Jang et al. · Journal of the Korean Physical Society · 2022 · 16 citations

Engineering, Manufacturing Engineering, Systems Engineering +12