Concepedia

Sangmin Jeong

SJ

Statistics

Publications

4

Citations

101

H-Index

4

Active since

1997

Affiliations

Seoul National University(Current)

Samsung (South Korea)

Sangmin Jeong is an author at Seoul National University specializing in engineering, physics, and plasma etching.

Publications per year

1997–2019

4

Publications

4

Effect on plasma and etch-rate uniformity of controlled phase shift between rf voltages applied to powered electrodes in a triode capacitively coupled plasma reactor

Dougyong Sung, Sangmin Jeong, Young-Min Park et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2008 · 39 citations

Natural Sciences, Electrical Engineering, Physics +15

Enhancement of the Virtual Metrology Performance for Plasma-Assisted Oxide Etching Processes by Using Plasma Information (PI) Parameters

Seolhye Park, Sangmin Jeong, Yunchang Jang et al. · IEEE Transactions on Semiconductor Manufacturing · 2015 · 38 citations

Engineering, Manufacturing Engineering, Physics +17

An analytical solution for transient temperature distribution in fillet arc welding including the effect of molten metal

Sangmin Jeong, H. S. Cho · Proceedings of the Institution of Mechanical Engineers Part B Journal of Engineering Manufacture · 1997 · 13 citations

Engineering, Manufacturing Engineering, Mechanical Engineering +17

Characteristics of a plasma information variable in phenomenology-based, statistically-tuned virtual metrology to predict silicon dioxide etching depth

Yunchang Jang, Hyun-Joon Roh, Seolhye Park et al. · Current Applied Physics · 2019 · 11 citations

Engineering, Electrical Engineering, Physics +11

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