Ji-Won Kwon

Development of Virtual Metrology Using Plasma Information Variables to Predict Si Etch Profile Processed by SF6/O2/Ar Capacitively Coupled Plasma

Ji-Won Kwon, Sangwon Ryu, Jihoon Park et al. · Materials · 2021 · 27 citations · Full text

Engineering, Physics, Instrumentation +16

Low-energy cross sections for the 6Li(p, 3He)4He reaction

Ji-Won Kwon, J.C. Kim, Baeckkyoung Sung · Nuclear Physics A · 1989 · 20 citations

Natural Sciences, Physics, Nuclear Physics +5

Plasma information-based virtual metrology (PI-VM) and mass production process control

Seolhye Park, Jaegu Seong, Yunchang Jang et al. · Journal of the Korean Physical Society · 2022 · 16 citations

Engineering, Manufacturing Engineering, Systems Engineering +12

Characteristics of a plasma information variable in phenomenology-based, statistically-tuned virtual metrology to predict silicon dioxide etching depth

Yunchang Jang, Hyun-Joon Roh, Seolhye Park et al. · Current Applied Physics · 2019 · 11 citations

Engineering, Electrical Engineering, Physics +11

Population Kinetics Modeling of Low-Temperature Argon Plasma

Hyun-Kyung Chung, Mi‐Young Song, Ji-Won Kwon et al. · Atoms · 2021 · 11 citations · Full text

Natural Sciences, Physics, Plasma Physics +16