Publication | Closed Access
Air damping of high performance resonating micro-mirrors with angular vertical comb-drive actuators
21
Citations
19
References
2019
Year
EngineeringMicrofabricationMechanical EngineeringMechanical SystemsMicroactuatorHigh PerformanceMicro-optical ComponentAir DampingVibration ControlMicro-electromechanical System
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