Statistics
Publications
67
Citations
3.9K
H-Index
30
Active since
1951
W Steckelmacher is an author at University of Sussex specializing in natural sciences, physics, and plasma physics.
Publications per year
1951–2001
67
67
W Steckelmacher · Physics Bulletin · 1973 · 451 citations
Handbook of thin film process technology
W Steckelmacher · Vacuum · 1996 · 285 citations
Natural Sciences, Chemical Engineering, Materials Science +12
VLSI Fabrication principles: Silicon and gallium arsenide
W Steckelmacher · Vacuum · 1995 · 218 citations
Engineering, Computer Engineering, Electrical Engineering +14
Handbook of ion implantation technology
W Steckelmacher · Vacuum · 1993 · 165 citations
The physics of charged particle beams
W Steckelmacher · Vacuum · 1990 · 153 citations
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