Concepedia
Vacuum · 1993 · 165 citations · 0 references
EngineeringMaterials ScienceImplant SurgeryImplant TechnologyIon ImplantationIon PermeationIonization ChambersIonization ProcessesSurgical ImplantationImplantation-induced Defect FormationIon Implantation EffectsSurface Modification By Ion Implantation