<title>Optical performance requirements for MEMS-scanner-based microdisplays</title>

High-resolution and high frame rate dynamic microdisplays can be implemented by scanning a photon beam in a raster format across the viewer's retina. Microvision is developing biaxial MEMS scanners for such video display applications. This paper discusses the optical performance requirements for scanning display systems. The display resolution directly translates into a scan-angle-mirror-size product and the frame rate translates into vertical and horizontal scanner frequencies. (theta) -product and f<SUB>h</SUB> are both very important figures of merit for scanner performance comparison. In addition, the static and dynamic flatness of the scanners, off-axis motion and scan repeatability, scanner position sensor accuracy all have a direct impact on display image quality.