Publication | Closed Access
Micro-machinability and edge chipping mechanism studies on diamond micro-milling of monocrystalline silicon
33
Citations
44
References
2019
Year
Materials ScienceDiamond-like CarbonMechanism StudiesEngineeringMicrofabricationMaterial MachiningTool WearMechanical EngineeringMachine ToolMachiningDiamond Micro-millingMonocrystalline SiliconMicroelectronicsMicrostructure
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