Concepedia

Tooru Asami

TA

Statistics

Publications

4

Citations

547

H-Index

4

Active since

2007

Affiliations

Tohoku University(Current)

Tooru Asami is an author at Tohoku University specializing in silicon materials, materials science, and semiconductor devices.

Publications per year

2007–2012

4

Publications

4

Fundamental investigation of subsurface damage in single crystalline silicon caused by diamond machining

Jiwang Yan, Tooru Asami, Hirofumi Harada et al. · Precision Engineering · 2008 · 265 citations

Engineering, Materials Engineering, Materials Science +16

Crystallographic effect on subsurface damage formation in silicon microcutting

Jiwang Yan, Tooru Asami, Hirofumi Harada et al. · CIRP Annals · 2012 · 144 citations

Engineering, Materials Engineering, Materials Science +16

Nondestructive measurement of machining-induced amorphous layers in single-crystal silicon by laser micro-Raman spectroscopy

Jiwang Yan, Tooru Asami, Tsunemoto Kuriyagawa · Precision Engineering · 2007 · 102 citations

Natural Sciences, Materials Engineering, Materials Science +17

Response of machining-damaged single-crystalline silicon wafers to nanosecond pulsed laser irradiation

Jiwang Yan, Tooru Asami, Tsunemoto Kuriyagawa · Semiconductor Science and Technology · 2007 · 36 citations

Engineering, Materials Engineering, Materials Science +17

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