Publication | Closed Access
Crystallographic effect on subsurface damage formation in silicon microcutting
142
Citations
12
References
2012
Year
Materials ScienceDamage MechanismEngineeringMicrofabricationApplied PhysicsSilicon On InsulatorSubsurface Damage FormationMechanics Of MaterialsMicrostructureSilicon Debugging
| Year | Citations | |
|---|---|---|
2011 | 880 | |
2008 | 260 | |
1990 | 255 | |
1996 | 172 | |
2011 | 144 | |
1995 | 138 | |
1998 | 134 | |
2007 | 98 | |
2007 | 84 | |
1994 | 71 |
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