Concepedia

Takayuki Shibata

TS

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Publications

58

Citations

1.8K

H-Index

24

Active since

1984

Affiliations

Toyohashi University of Technology(Current)

Hokkaido University

Hirosaki University

Nitto (Japan)

Denso (Japan)

Takayuki Shibata is an author at Toyohashi University of Technology specializing in engineering, materials engineering, and microfabrication.

ORCID

Publications per year

1984–2024

58

Publications

58

Fabrication of TiNi shape memory micropump

Eiji Makino, Takashi Mitsuya, Takayuki Shibata · Sensors and Actuators A Physical · 2001 · 183 citations

, , +12

Ductile-regime turning mechanism of single-crystal silicon

Takayuki Shibata, Shigeru Fujii, Eiji Makino et al. · Precision Engineering · 1996 · 174 citations

, , +10

Characterization of sputtered ZnO thin film as sensor and actuator for diamond AFM probe

Takayuki Shibata, Kazuya Unno, Eiji Makino et al. · Sensors and Actuators A Physical · 2002 · 122 citations

, , +14

Cross-section transmission electron microscope observations of diamond-turned single-crystal Si surfaces

Takayuki Shibata, Atsushi Ono, Kenji Kurihara et al. · Applied Physics Letters · 1994 · 71 citations

, , +17

Micromachining of TiNi shape memory thin film for fabrication of micropump

Eiji Makino, Takashi Mitsuya, Takayuki Shibata · Sensors and Actuators A Physical · 2000 · 70 citations

, , +11

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