Concepedia

Kazuya Unno

KU

Statistics

Publications

6

Citations

308

H-Index

6

Active since

1999

Affiliations

Hokkaido University(Current)

Hitachi (Japan)

Ibaraki University

Hirosaki University

Kazuya Unno is an author at Hokkaido University specializing in materials science, engineering, and atomic force microscopy.

Publications per year

1999–2004

6

Publications

6

Characterization of sputtered ZnO thin film as sensor and actuator for diamond AFM probe

Takayuki Shibata, Kazuya Unno, Eiji Makino et al. · Sensors and Actuators A Physical · 2002 · 122 citations

Engineering, Materials Engineering, Materials Science +14

Micromachining of diamond film for MEMS applications

Takayuki Shibata, Yasutaka Kitamoto, Kazuya Unno et al. · Journal of Microelectromechanical Systems · 2000 · 70 citations

Engineering, Materials Engineering, Materials Science +17

Fabrication and characterization of diamond AFM probe integrated with PZT thin film sensor and actuator

Takayuki Shibata, Kazuya Unno, Eiji Makino et al. · Sensors and Actuators A Physical · 2004 · 45 citations

Engineering, Materials Engineering, Materials Science +14

Scaling properties of InAs/GaAs self-assembled quantum dots

Y. Ebiko, Shunichi Muto, Dai Suzuki et al. · Physical review. B, Condensed matter · 1999 · 30 citations

Natural Sciences, Materials Science, Physics +17

Micromachining of diamond probes for atomic force microscopy applications

Kazuya Unno, Takayuki Shibata, Eiji Makino · Sensors and Actuators A Physical · 2001 · 29 citations

Engineering, Materials Engineering, Materials Science +12

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