Fundamental investigation of subsurface damage in single crystalline silicon caused by diamond machining

Amorphization and Conductivity of Silicon and Germanium Induced by Indentation

David R. Clarke, Markus Kroll, P. D. Kirchner et al. · Physical Review Letters · 1988 · 412 citations

Natural Sciences, Materials Engineering, Materials Science +17

Phase transformations of silicon caused by contact loading

Andreas Kailer, Yury Gogotsi, Klaus G. Nickel · Journal of Applied Physics · 1997 · 371 citations

Natural Sciences, Materials Engineering, Materials Science +17

Indentation-induced phase transformations in silicon: influences of load, rate and indenter angle on the transformation behavior

Jae‐il Jang, Michael J. Lance, Songqing Wen et al. · Acta Materialia · 2005 · 313 citations

Natural Sciences, Materials Engineering, Materials Science +16

Raman microspectroscopy study of processing-induced phase transformations and residual stress in silicon

Yury Gogotsi, Chang‐Wook Baek, F.‐G. Kirscht · Semiconductor Science and Technology · 1999 · 235 citations

Natural Sciences, Materials Engineering, Materials Science +16

New evidence for a pressure-induced phase transformation during the indentation of silicon

George M. Pharr, W. C. Oliver, David Scott Harding · Journal of materials research/Pratt's guide to venture capital sources · 1991 · 231 citations

Natural Sciences, Materials Engineering, Materials Science +14