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Nondestructive measurement of machining-induced amorphous layers in single-crystal silicon by laser micro-Raman spectroscopy

Materials ScienceAdvanced Laser ProcessingEngineeringLaser Micro-processingOptical PropertiesMicrofabricationMechanical EngineeringApplied PhysicsMachining-induced Amorphous LayersLaser Micro-raman SpectroscopyLaser Processing TechnologyLaser-assisted DepositionAmorphous SolidSilicon On InsulatorNondestructive Measurement