A facile method for direct bonding of single-crystalline SiC to Si, SiO2, and glass using VUV irradiation - Concepedia

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A facile method for direct bonding of single-crystalline SiC to Si, SiO2, and glass using VUV irradiation

31

Citations

34

References

2018

Year

Chenxi Wang, Jikai Xu, Shu Guo, Qiushi Kang, Yuan Wang, Yi‐Ping Wang, Yanhong Tian

Applied Surface Science

Materials ScienceMaterials EngineeringEngineeringVuv IrradiationSingle-crystalline SicApplied PhysicsSiliceneDirect BondingSemiconductor Device FabricationStructural CeramicSilicon On InsulatorCarbide

References

	Year	Citations

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