Concepedia

Jeremy Theil

JT

Statistics

Publications

32

Citations

1.1K

H-Index

19

Active since

1988

Affiliations

Xperi (United States)(Current)

Agilent Technologies (United States)

North Carolina State University

Hewlett-Packard (United States)

University of Illinois Urbana-Champaign

Jeremy Theil is an author at Xperi (United States) specializing in materials science, engineering, and electronic materials.

Publications per year

1988–2023

32

Publications

32

Local bonding environments of Si–OH groups in SiO2 deposited by remote plasma-enhanced chemical vapor deposition and incorporated by postdeposition exposure to water vapor

Jeremy Theil, D. V. Tsu, M. W. Watkins et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 178 citations

, , +17

Fluorinated amorphous carbon films for low permittivity interlevel dielectrics

Jeremy Theil · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 72 citations

, , +17

Carbon content of silicon oxide films deposited by room temperature plasma enhanced chemical vapor deposition of hexamethyldisiloxane and oxygen

Jeremy Theil, John G. Brace, R.W. Knoll · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1994 · 66 citations

, , +17

Low Temperature Cu Interconnect with Chip to Wafer Hybrid Bonding

Guilian Gao, Laura Mirkarimi, Thomas Workman et al. · 2019 · 63 citations

, , +16

Effects of microstructure and nonstoichiometry on electrical properties of vanadium dioxide films

Eiji Kusano, Jeremy Theil · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 59 citations

, , +17

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