Publication | Closed Access
Polishing Characteristics of MnO2 Polishing Slurry on the Si-face of SiC Wafer
35
Citations
23
References
2018
Year
Materials ScienceMaterials EngineeringChemical EngineeringSinteringPowder MetallurgyMaterial ProcessingCorrosionEngineeringSic WaferMno2 Polishing SlurryMicrostructure
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