Concepedia

Publication | Closed Access

Annealing effects on properties of Ga2O3 films deposited by plasma-enhanced atomic layer deposition

DOI

41

Citations

13

References

2018

Year

Fengfeng Shi, Jun Han, Yanhui Xing, Junshuai Li, Li Zhang, Tao He, Tao Li, Xuguang Deng, Xiaodong Zhang, Baoshun Zhang
Materials Letters

References

YearCitations

Page 1