Annealing effects on properties of Ga2O3 films deposited by plasma-enhanced atomic layer deposition

Fengfeng Shi, Jun Han, Yanhui Xing, Junshuai Li, Li Zhang, Tao He, Tao Li, Xuguang Deng, Xiaodong Zhang, Baoshun Zhang

Materials Letters · 2018 · 42 citations · 13 references

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