Materials Letters · 2018 · 42 citations · 13 references
Natural SciencesMaterials EngineeringMaterials ScienceSemiconductor MaterialsSurface ScienceThin FilmsAtomic Layer DepositionOxide SemiconductorsPlasma Surface TreatmentThin Film AnnealingThin-film DepositionThin-film MaterialsAnnealing EffectsAnnealing Temperature EffectsAnnealing Time EffectsPlasma-enhanced Atomic Layer DepositionPlasma-enhanced Deposition
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Deep-ultraviolet transparent conductive β-Ga2O3 thin films
Masahiro Orita, Hiromichi Ohta, Masahiro Hirano et al. · Applied Physics Letters · 2000 · 996 citations
Natural Sciences, Materials Engineering, Materials Science +17
Ge-Doped ${\beta }$ -Ga2O3 MOSFETs
Jonathan P. McCandless, Antonio Crespo, Kevin Leedy et al. · IEEE Electron Device Letters · 2017 · 228 citations
XPS analysis of gallium oxides
R. Carli, Claudia L. Bianchi · Applied Surface Science · 1994 · 208 citations
Natural Sciences, Materials Engineering, Materials Science +8