ECS Journal of Solid State Science and Technology · 2018 · 14 citations · 45 references
Natural SciencesMaterials EngineeringMaterials ScienceCondensed Matter PhysicsMagnetic MaterialsThin FilmsAtomic Layer DepositionFerroelectric MaterialsFerromagnetic MaterialsFerromagnetismMagnetic Properties Of SolidsThin Film Magnetic PropertiesElectrical PropertiesElectrical Properties AnalysisFerroelectric PropertiesMagnetic PropertiesTetragonal SystemThin Film FerroelectricsThin Oxide FilmsZirconia
Atomic layer deposition method was employed to deposit thin films consisting of ZrO2 and HfO2. Zirconia films were doped with hafnia and vice versa, and also nanolaminates were formed. All depositions were carried out at 300 degrees C. Most films were crystalline in their as-deposited state. Zirconia exhibited the metastable cubic and tetragonal phases by a large majority, whereas hafnia was mostly in its stable monoclinic phase. Magnetic and electrical properties of the films were assessed. Un-doped zirconia was ferromagnetic and this property diminished with increasing the amount of hafnia in a film. All films exhibited ferroelectric-like behavior and the polarization curves also changed with respect to the film composition. (C) The Author(s) 2018. Published by ECS.
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Ferroelectricity in hafnium oxide thin films
T. S. Böscke, Johannes Müller, D. Bräuhaus et al. · Applied Physics Letters · 2011 · 2.7K citations
Natural Sciences, Materials Engineering, Materials Science +17
Ferroelectricity in Simple Binary ZrO<sub>2</sub> and HfO<sub>2</sub>
Johannes Müller, T. S. Böscke, U. Schröder et al. · Nano Letters · 2012 · 1.7K citations