Fan-Out Wafer-Level Packaging for Heterogeneous Integration

Abstract

The design, materials, process, fabrication, and reliability of a heterogeneous integration of four chips and four capacitors by a fan-out wafer-level packaging (FOWLP) method are investigated in this paper. Emphasis is placed on the application of a new assembly process for fabricating the redistribution layers of the FOWLP. Reliability assessments, such as the thermal cycling and drop test, are also performed.