High aspect ratio anisotropic silicon etching for x-ray phase contrast imaging grating fabrication

Fabrication of novel three-dimensional microstructures by the anisotropic etching of

E. Bassous · IEEE Transactions on Electron Devices · 1978 · 311 citations

Engineering, Materials Engineering, Materials Science +15

Differences in anisotropic etching properties of KOH and TMAH solutions

Mitsuhiro Shikida, Kazuo Sato, Kenji Tokoro et al. · Sensors and Actuators A Physical · 2000 · 253 citations

Natural Sciences, Materials Engineering, Materials Science +9

Vertical Etching of Silicon at very High Aspect Ratios

Don L. Kendall · Annual Review of Materials Science · 1979 · 220 citations

Engineering, Materials Engineering, Materials Science +14

Fabrication of diffraction gratings for hard X-ray phase contrast imaging

C. David, J. Bruder, T. Rohbeck et al. · Microelectronic Engineering · 2007 · 218 citations

Natural Sciences, Materials Science, Physics +13

High aspect ratio gratings for X-ray phase contrast imaging

Jürgen Mohr, Thomas Grund, J. Kenntner et al. · AIP conference proceedings · 2012 · 87 citations

Natural Sciences, Materials Engineering, Materials Science +13