Development of GaN Vertical Trench-MOSFET With MBE Regrown Channel

Abstract

GaN vertical trench-MOSFETs incorporating molecular beam epitaxy (MBE) regrown channel are developed and investigated. The channel regrowth by MBE prevents repassivation of the p-type GaN body while promising higher channel mobility. Two different designs of the lateral portion of the regrown channel are compared: without or with an n <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">+</sup> -GaN buried layer. Without an n <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">+</sup> -buried layer, a respectable 600-V breakdown voltage (BV) is measured in the absence of edge termination, indicating a decent critical field strength (>1.6 MV/cm) of the regrown channel. However, the ON-resistance is limited by the highly resistive lateral channel due to Mg incorporation. With an n <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">+</sup> -buried layer, the limitation is removed. Excellent ON-current of 130 mA/mm and ON-resistivity of 6.4 mΩ · cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> are demonstrated. The BV is limited by high source-drain leakage current from the channel due to drain-induced barrier lowering (DIBL) effect. Device analysis together with TCAD simulations points out the major cause for the DIBL effect: the presence of interface charge beyond a critical value (~6 × 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">12</sup> cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-2</sup> ) at the regrowth interface on etched sidewalls. This paper provides valuable insights into the design of GaN vertical trench-MOSFET with a regrown channel, where simultaneous achievement of low ON-resistivity and high BV is expected in devices with reduced interface charge density and improved channel design to eliminate DIBL.