Influence of the nucleation layer morphology on the structural property of AlN films grown on c-plane sapphire by MOCVD - Concepedia

Concepedia

Publication | Closed Access

Influence of the nucleation layer morphology on the structural property of AlN films grown on c-plane sapphire by MOCVD

42

Citations

44

References

2016

Year

Weike Luo, Liang Li, Zhonghui Li, Qiankun Yang, Dongguo Zhang, Xun Dong, Daqing Peng, Lei Pan, Chuanhao Li, Bin Liu,

Journal of Alloys and Compounds

Materials ScienceMaterials EngineeringAln FilmsAluminium NitrideEngineeringCrystal Growth TechnologySurface ScienceApplied PhysicsStructural PropertyNucleation Layer MorphologyChemical Vapor DepositionThin Film ProcessingMicrostructure

References

	Year	Citations

Page 1

Page 1