Concepedia

Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition

Małgorzata Kot, Karsten Henkel, Chittaranjan Das, Simone Brizzi, Irina Kärkkänen, Jessica Schneidewind, Franziska Naumann, Hassan Gargouri, Dieter Schmeißer

Surface and Coatings Technology · 2016 · 21 citations · 37 references

DOI

Concepts

References

37

Visible-Light Photocatalysis in Nitrogen-Doped Titanium Oxides

Ryoji Asahi, Takeshi Morikawa, Takeshi Ohwaki et al. · Science · 2001 · 12.2K citations

, , +17

Calculations of electron inelastic mean free paths. V. Data for 14 organic compounds over the 50–2000 eV range

Shigeo Tanuma, C. J. Powell, David R. Penn · Surface and Interface Analysis · 1994 · 2.7K citations

, , +13

Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends

Ville Miikkulainen, Markku Leskelä, Mikko Ritala et al. · Journal of Applied Physics · 2013 · 1.4K citations

, , +17

Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges

Harald B. Profijt, Stephen E. Potts, M. C. M. van de Sanden et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2011 · 881 citations · Full text

, , +15

Electronic structure of anatase TiO2 oxide

R. Sanjinés, H. Berger, F. Gozzo et al. · Journal of Applied Physics · 1994 · 755 citations · Full text

, , +17