Jessica Schneidewind

Thermal and plasma enhanced atomic layer deposition of TiO2: Comparison of spectroscopic and electric properties

Chittaranjan Das, Karsten Henkel, Massimo Tallarida et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2014 · 32 citations

Natural Sciences, Materials Engineering, Materials Science +17

Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study

M. Sowińska, Karsten Henkel, Dieter Schmeißer et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2015 · 25 citations

Natural Sciences, Materials Engineering, Materials Science +17

CMOS-compatible purely capacitive interfaces for high-density in-vivo recording from neural tissue

Sven Schröder, Claudia Cecchetto, Stefan Keil et al. · 2015 · 24 citations

Engineering, Bioengineering, Biomedical Engineering +17

Analysis of nitrogen species in titanium oxynitride ALD films

M. Sowińska, Simone Brizzi, Chittaranjan Das et al. · Applied Surface Science · 2016 · 22 citations

Natural Sciences, Materials Engineering, Materials Science +14

Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition

Małgorzata Kot, Karsten Henkel, Chittaranjan Das et al. · Surface and Coatings Technology · 2016 · 21 citations

Natural Sciences, Materials Engineering, Materials Science +15