Concepedia

Franziska Naumann

FN

Statistics

Publications

12

Citations

375

H-Index

10

Active since

1994

Affiliations

SENTECH Instruments (Germany)(Current)

Brandenburg University of Technology Cottbus-Senftenberg

Leibniz Institute for High Performance Microelectronics

Franziska Naumann is an author at SENTECH Instruments (Germany) specializing in materials science, materials engineering, and natural sciences.

ORCID

Publications per year

1994–2022

12

Publications

12

Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al<sub>2</sub>O<sub>3</sub>-films

Jörg Haeberle, Karsten Henkel, Hassan Gargouri et al. · Beilstein Journal of Nanotechnology · 2013 · 112 citations · Full text

, , +17

Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition

Ali Mahmoodinezhad, C. Janowitz, Franziska Naumann et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2020 · 80 citations

, , +17

Growth Rate and Characterization of Silicon Oxide Films Grown in  N 2 O  Atmosphere in a Rapid Thermal Processor

Peter J. de Lange, H. Bernt, E. Hartmannsgruber et al. · Journal of The Electrochemical Society · 1994 · 39 citations

, , +17

Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study

M. Sowińska, Karsten Henkel, Dieter Schmeißer et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2015 · 25 citations

, , +17

Analysis of nitrogen species in titanium oxynitride ALD films

M. Sowińska, Simone Brizzi, Chittaranjan Das et al. · Applied Surface Science · 2016 · 22 citations

, , +14

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