Ali Mahmoodinezhad

Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition

Ali Mahmoodinezhad, C. Janowitz, Franziska Naumann et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2020 · 80 citations

Natural Sciences, Materials Engineering, Materials Science +17

Low-temperature atomic layer deposition of indium oxide thin films using trimethylindium and oxygen plasma

Ali Mahmoodinezhad, Carlos Morales, Franziska Naumann et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2021 · 13 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Combination of Multiple Operando and In-Situ Characterization Techniques in a Single Cluster System for Atomic Layer Deposition: Unraveling the Early Stages of Growth of Ultrathin Al2O3 Films on Metallic Ti Substrates

Carlos Morales, Ali Mahmoodinezhad, Rudi Tschammer et al. · Inorganics · 2023 · 12 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

<i>In situ</i> real-time and <i>ex situ</i> spectroscopic analysis of Al2O3 films prepared by plasma enhanced atomic layer deposition

Franziska Naumann, Johanna Reck, Hassan Gargouri et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2020 · 10 citations

Natural Sciences, Materials Engineering, Materials Science +17

Toward controlling the Al₂O₃/ZnO interface properties by <i>in situ</i> ALD preparation

C. Janowitz, Ali Mahmoodinezhad, Małgorzata Kot et al. · Dalton Transactions · 2022 · 10 citations

Natural Sciences, Materials Engineering, Materials Science +17