Concepedia

Rudi Tschammer

RT

Statistics

Publications

1

Citations

12

H-Index

1

Active since

2023

Affiliations

Leibniz Institute for High Performance Microelectronics(Current)

Rudi Tschammer is an author at Leibniz Institute for High Performance Microelectronics specializing in x-ray photoelectron spectroscopy, spectroscopic ellipsometry, and in situ characterization.

ORCID

Publications per year

2023–2023

1

Publications

1

Combination of Multiple Operando and In-Situ Characterization Techniques in a Single Cluster System for Atomic Layer Deposition: Unraveling the Early Stages of Growth of Ultrathin Al2O3 Films on Metallic Ti Substrates

Carlos Morales, Ali Mahmoodinezhad, Rudi Tschammer et al. · Inorganics · 2023 · 12 citations · Full text

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