Materials Science in Semiconductor Processing · 2016 · 33 citations · 51 references
Natural SciencesMaterials SciencePhysicsCondensed Matter PhysicsElectronic MaterialsSemiconductor DevicesDefects In Electronic MaterialsDevice ModelingLaser PhysicsSemiconductor Crystal GrowthSemiconductor DefectsSilicon MaterialsAnnealing Temperature EffectsLaser AnnealingSilicon Annealing
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Reciprocal Relations in Irreversible Processes. I.
Lars Onsager · Physical Review · 1931 · 6.6K citations · Full text
Natural Sciences, Chemistry, Physics +17
Reciprocal Relations in Irreversible Processes. II.
Lars Onsager · Physical Review · 1931 · 5.3K citations · Full text
Point defects and dopant diffusion in silicon
P. Fahey, Peter B. Griffin, J.D. Plummer · Reviews of Modern Physics · 1989 · 1.4K citations