Laser annealing in Si and Ge: Anomalous physical aspects and modeling approaches

Salvatore Francesco Lombardo, Simona Boninelli, F. Cristiano, Giuseppe Fisicaro, G. Fortunato, M.G. Grimaldi, G. Impellizzeri, M. Italia, Antigone Marino, Ruggero Milazzo,

Materials Science in Semiconductor Processing · 2016 · 33 citations · 51 references

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