Development of a Large-scale 3D MEMS Optical Switch Module

Abstract

A three-dimensional (3D) micro-electro-mechanical system (MEMS) optical switch, consisting of twoaxis tilt mirror arrays and free-space optics, is a practical solution for constructing large-scale switching fabrics due to its high component density and low cost. The MEMS-mirror arrays developed by NTT are single-crystal silicon mirrors integrated with high-aspect ratio torsion springs and actuated by electrostatic forces. The free-space optics consist of low-cost high-precision polymer components assembled passively. A prototype module with 100-channel optical fiber input/output exhibited a low coupling loss of 4.0 dB and a switching time of 3 ms.