IEEE Communications Magazine · 2002 · 172 citations · 7 references
EngineeringComputer EngineeringElectrical EngineeringMicroelectronicsMicrofabricationPhotonicsMems DesignMems FabricationMems SwitchesOptical InterconnectsOptical MemsWaveguidesIntegrated Electro-optic DevicesMems-based Photonic DevicesOptical CrossconnectsOptical Interconnect Architectures
MEMS devices are beginning to impact almost every area of science and technology. In fields as disparate as wireless communications, automotive design, entertainment, and lightwave systems MEMS is increasingly becoming a key technology. In this article we discuss MEMS devices in general, show how and where they will be used in lightwave systems, and then show in detail how they are allowing a billion dollar business to be born, that of large all-optical crossconnects. In particular we highlight one particular device, the Lucent LambdaRouter, and show how it is built from the chip on up and discuss its performance and applications.
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Micromachining for optical and optoelectronic systems
Ming C. Wu · Proceedings of the IEEE · 1997 · 264 citations
Wavelength add-drop switching using tilting micromirrors
Joseph E. Ford, Vladimir Aksyuk, David J. Bishop et al. · Journal of Lightwave Technology · 1999 · 248 citations