Yuji Uenishi

Micro-opto-mechanical devices fabricated by anisotropic etching of (110) silicon

Yuji Uenishi, Masahiro Tsugai, Mehran Mehregany · Journal of Micromechanics and Microengineering · 1995 · 77 citations

Materials Science, Optical Materials, Engineering +15

Tunable laser diode using a nickel micromachinedexternal mirror

Yuji Uenishi, K. Honma, Shiro Nagaoka · Electronics Letters · 1996 · 71 citations

Reactive–fast-atom beam etching of GaAs using Cl2 gas

Fusao Shimokawa, Hidenao Tanaka, Yuji Uenishi et al. · Journal of Applied Physics · 1989 · 62 citations

Semiconductors, Materials Science, Electrical Engineering +14

A Photomicrodynamic System with a Mechanical Resonator Monolithically Integrated with Laser Diodes on Gallium Arsenide

Hiroo Ukita, Yuji Uenishi, Hidenao Tanaka · Science · 1993 · 57 citations

Engineering, Optoelectronic Devices, Micro-optical Component +19

Characterization of AlGaAs microstructure fabricated by AlGaAs/GaAs micromachining

Yuji Uenishi, H. Tanaka, Hiroo Ukita · IEEE Transactions on Electron Devices · 1994 · 45 citations

Aluminium Nitride, Engineering, Mechanical Engineering +19