28
Publications
635
Citations
15
H-Index
1988
Active since
Fusao Shimokawa is an author at Kagawa University specializing in engineering, microfabrication, and applied physics.
Top concepts
EngineeringMicrofabricationApplied PhysicsElectrical EngineeringMaterial ScienceMicroelectronicsOptoelectronicsPhotonicsOptical PropertiesMicrofluidics
Publications per year
1988–2020
28
28
Reactive–fast-atom beam etching of GaAs using Cl2 gas
Fusao Shimokawa, Hidenao Tanaka, Yuji Uenishi et al. · Journal of Applied Physics · 1989 · 62 citations
Semiconductors, Materials Science, Electrical Engineering +14
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1–5 of 28