17
Publications
562
Citations
14
H-Index
1986
Active since
Hidenao Tanaka is an author at NTT (Japan) specializing in engineering, applied physics, and optoelectronics.
Top concepts
EngineeringApplied PhysicsOptoelectronicsElectrical EngineeringPhotonicsOptical MaterialsMaterial ScienceSemiconductorsLaser ApplicationsMicroelectronics
Publications per year
1986–2016
17
17
Reactive–fast-atom beam etching of GaAs using Cl2 gas
Fusao Shimokawa, Hidenao Tanaka, Yuji Uenishi et al. · Journal of Applied Physics · 1989 · 62 citations
Semiconductors, Materials Science, Electrical Engineering +14
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1–5 of 17