Masahiro Tsugai

Micro-opto-mechanical devices fabricated by anisotropic etching of (110) silicon

Yuji Uenishi, Masahiro Tsugai, Mehran Mehregany · Journal of Micromechanics and Microengineering · 1995 · 77 citations

Materials Science, Optical Materials, Engineering +15

Development of a micro-optical distance sensor

Toru Oka, Hajime Nakajima, Masahiro Tsugai et al. · Sensors and Actuators A Physical · 2002 · 33 citations

Photonics, Photonic Sensor, Engineering +5

Hybrid-integrated laser-diode micro-external mirrorfabricated by (110) silicon micromachining

Yuji Uenishi, Masahiro Tsugai, Mehran Mehregany · Electronics Letters · 1995 · 31 citations

Micro-opto-mechanical devices fabricated by anisotropic etching of [110] silicon

Yuji Uenishi, Masahiro Tsugai, Mehran Mehregany · 2002 · 19 citations

Materials Science, Optical Materials, Engineering +13

Novel readout circuit architecture realizing TEC-less operation for SOI diode uncooled IRFPA

T. Ohnakado, Masashi Ueno, Yasuaki Ohta et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 11 citations