Piezoresistive effect in p-type 3C-SiC at high temperatures characterized using Joule heating

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Ultra-sensitive NEMS-based cantilevers for sensing, scanned probe and very high-frequency applications

Mo Li, Hong X. Tang, M. L. Roukes · Nature Nanotechnology · 2007 · 1K citations

Electrical Engineering, Engineering, Sensors +8

Review: Semiconductor Piezoresistance for Microsystems

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Engineering, Mechanical Engineering, Microelectromechanical Systems +16

Silicon carbide as a new MEMS technology

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Materials Science, Engineering, Microfabrication +6

Silicon carbide and diamond for high temperature device applications

M. Willander, M. Friesel, Q. Wahab et al. · Journal of Materials Science Materials in Electronics · 2005 · 281 citations

Materials Science, Diamond-like Carbon, Engineering +4