Concepedia

Monitoring of stress reduction in shallow trench isolation CMOS structures via synchrotron X-ray topography, electrical data and raman spectroscopy

P.J. McNally, J. Curley, M. Bolt, A. Reader, T. Tuomi, R. Rantama ̈ki, A.N. Danilewsky, Ingrid DeWolf

Journal of Materials Science Materials in Electronics · 1999 · 15 citations · 10 references

Concepts

EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesSpectroscopyBase IsolationCmos Circuit DesignIn-situ Stress MeasurementLeakage Power ReductionX-ray Photoelectron SpectroscopyCmos ReliabilityGate Oxide DegradationMechanical Stress ReductionStress ReductionSynchrotron X-ray ScatteringSynchrotron X-ray SpectroscopySynchrotron-based X-ray Photoelectron SpectroscopyX-ray Topography

References

10

Micro-Raman spectroscopy to study local mechanical stress in silicon integrated circuits

Ingrid De Wolf · Semiconductor Science and Technology · 1996 · 970 citations

Engineering, Electrical Engineering, Materials Science +17

Use of synchrotron radiation in X-ray diffraction topography

K. Naukkarinen, P. Rabe · physica status solidi (a) · 1974 · 239 citations

Natural Sciences, Materials Science, Physics +16

Enhanced X-Ray Diffraction from Substrate Crystals Containing Discontinuous Surface Films

Ilan A. Blech, Eugene S. Meieran · Journal of Applied Physics · 1967 · 155 citations

Natural Sciences, Materials Engineering, Materials Science +17

Synchrotron radiation – its application to high-speed, high-resolution X-ray diffraction topography

Michael Hart · Journal of Applied Crystallography · 1975 · 102 citations

Natural Sciences, Materials Engineering, Materials Science +16

New X-Ray Diffraction Microscopy Technique for the Study of Imperfections in Semiconductor Crystals

G. H. Schwuttke · Journal of Applied Physics · 1965 · 86 citations

Engineering, Electrical Engineering, Materials Science +15