Concepedia

R. Rantama ̈ki

RR

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Publications

1

Citations

15

H-Index

1

Active since

1999

Affiliations

University of Helsinki(Current)

R. Rantama ̈ki is an author at University of Helsinki specializing in microelectronics, x-ray photoelectron spectroscopy, and stress reduction.

Publications per year

1999–1999

1

Publications

1

Monitoring of stress reduction in shallow trench isolation CMOS structures via synchrotron X-ray topography, electrical data and raman spectroscopy

P.J. McNally, J. Curley, M. Bolt et al. · Journal of Materials Science Materials in Electronics · 1999 · 15 citations

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