Gas‐Permeable Cellulose Template for Reduction of Template Damage and Gas Trapping in Microimprint Lithography of High Volume Manufacturing

Abstract

A gas‐permeable cellulose template for microimprint lithography has been synthesized and characterized for the reduction of template damage and gas trapping caused by solvents and oxygen generated from cross‐linked materials. The 5 μm line‐pattern failure of the microimprinted UV cross‐linked liquid materials with 4.7 wt% acetone as a volatile solvent is solved by using the gas‐permeable cellulose template because of its increased oxygen permeability. The gas‐permeable cellulose template also allows the use of volatile solvents with high coating property and solubility into the microimprinted materials instead of the compounds and plastic resins conventionally used in mold injection. image