Makoto Hanabata - Concepedia

Author

Makoto Hanabata

Toyama Prefectural University

Also Known As

M. Hanabata, Makoto HANABATA, Makoto Hanabata, Y. Itow

Publications

814

Citations

H-Index

Concepts

All Affiliations

Toyama Prefectural University Sumitomo Chemical (Japan)The University of Osaka Kyoto University Gifu University

About

Makoto Hanabata is an author at Toyama Prefectural University specializing in materials science, engineering, and microfabrication.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	14	17	372
2	Natural Sciences	5	5	128
3	Applied Physics	5	5	104
4	Health Sciences	4	4	75
5	Medicine	2	2	32

Makoto Hanabata

Publications

498

Citations

H-Index

Page 1

	Year	Citations
Σp elastic-scattering in the region of 400<p<700 MeV/c with a scintillating-fiber active target Y. Kondō, J. K. Ahn, H. Akikawa, Nuclear Physics A EngineeringNuclear PhysicsPhysicsOptical PropertiesNatural Sciences	2000	45
Design concept for a high-performance positive photoresist Makoto Hanabata, Yasunori Uetani, Akihiro Furuta Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena EngineeringOrganic ChemistryChemistryImage SensorPolymers	1989	38
Silicon-Containing Spin-on Underlayer Material for Step and Flash Nanoimprint Lithography Satoshi Takei, Tsuyoshi Ogawa, Ryan Deschner, Japanese Journal of Applied Physics EngineeringElectron-beam LithographyPattern TransferBiomedical EngineeringSilicon On Insulator	2010	34
Ultraviolet nanoimprint lithography using cyclodextrin-based porous template for pattern failure reduction Satoshi Takei, Makoto Hanabata Applied Physics Letters EngineeringNanoporous MaterialPattern TransferUv Nanoimprint LithographyPorous Polymer	2015	33
Quasifree p(K, K)Ξ reaction in nuclear emulsion S. Aoki, S. Asai, S. Y. Bahk, Nuclear Physics A High-energy Nuclear ReactionNuclear PhysicsPhysicsNatural SciencesChemical Kinetics	1998	28
Inedible cellulose-based biomass resist material amenable to water-based processing for use in electron beam lithography Satoshi Takei, Hirotaka Maki, Kigen Sugahara, AIP Advances EngineeringBioenergyElectron-beam LithographyWoody BiomassBio-based Material	2015	23
<title>Novolak design for high-resolution positive photoresists (IV): tandem-type novolak resin for high-performance positive photoresists</title> Makoto Hanabata, Fumio Oi, Akihiro Furuta Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Materials ScienceNovolak ResinsNovolak ResinEngineeringPhotochemistry	1991	23
Novolak Design For High Resolution Positive Photoresists(II): Stone Wall Model For Positive Photoresist Development Makoto Hanabata, Yasunori Uetani, Akihiro Furuta Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE	1988	22
Novolak Design For High Resolution Positive Photoresists Makoto Hanabata, Akihiro Furuta, Yukikazu Uemura Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE PhotodegradationPhotorespirationPhotochemistryMicroscopyPhotosystems	1987	21
Gas‐Permeable Cellulose Template for Reduction of Template Damage and Gas Trapping in Microimprint Lithography of High Volume Manufacturing Satoshi Takei, Shinya Nakajima, Kigen Sugahara, Macromolecular Materials and Engineering Template DamageFood PackagingEngineeringIncreased Oxygen PermeabilityMolding (Process)	2016	21

Page 1