Kigen Sugahara

Inedible cellulose-based biomass resist material amenable to water-based processing for use in electron beam lithography

Satoshi Takei, Hirotaka Maki, Kigen Sugahara et al. · AIP Advances · 2015 · 23 citations · Full text

Engineering, Bioenergy, Electron-beam Lithography +19

Gas‐Permeable Cellulose Template for Reduction of Template Damage and Gas Trapping in Microimprint Lithography of High Volume Manufacturing

Satoshi Takei, Shinya Nakajima, Kigen Sugahara et al. · Macromolecular Materials and Engineering · 2016 · 21 citations

Template Damage, Food Packaging, Engineering +16

Application of natural linear polysaccharide to green resist polymers for electron beam and extreme-ultraviolet lithography

Satoshi Takei, Akihiro Oshima, Kenta Ito et al. · Japanese Journal of Applied Physics · 2014 · 16 citations

Engineering, Polymer Nanotechnology, Chemistry +16

Development of Nanoimprint Lithography Template Materials using Biomass

Shinya Nakajima, Satoshi Takei, Ziqi Zhou et al. · Journal of Photopolymer Science and Technology · 2016 · 16 citations · Full text

Engineering, Nanoporous Material, Polymer Nanocomposites +18

Nanoimprint lithography using disposable biomass template

Makoto Hanabata, Satoshi Takei, Kigen Sugahara et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 12 citations