Materials Research Society Symposium Proceedings · 2008 · 11 citations · 0 references
EngineeringElectrical EngineeringMaterials ScienceElectronic MaterialsMetallic MaterialsSemiconductor DevicesInterconnect ArchitectureInterconnect DesignInterconnect TechnologyMetallic BondingVery-large-scale Integration LayoutWafer Bonding3D Integrated CircuitsBondingInterconnect FabricationThree-dimensional Integrated Circuit LayoutWire Bonding