Reduction in Viscosity of Quasi-2D-Confined Nanoimprint Resin through the Addition of Fluorine-Containing Monomers: Shear Resonance Study

Abstract

The fluidity of the resin for the nanoimprint lithography was investigated in a quasi-2D space by the shear resonance measurement, which enables us to measure the viscous property of the resin confined in a nanometer gap between mica surfaces. With this technique, we could observe that the resin fluidity was enhanced by the addition of the fluorine-containing monomer. The fluidity of the resin with the fluorine-containing monomer was maintained until the distance between mica surfaces became smaller than 15 nm, wheras the resin without the fluorine-containing monomer started losing its fluidity when the distance became 30 nm. Two reasons possibly explain the result; (i) the interaction between the resin and mica was reduced by the existence of the fluorine-containing segregated layer at the interface, and (ii) the reduction in viscosity took place by the addition of the fluorine-containing monomer that reduced the degree of chain entanglement in the resin because of its small intermolecular interaction force. The effect of the length of the perfluoroalkyl chain in the fluorine-containing monomer is also discussed.