Properties Of SiC Film As X-Ray Mask Membrane

Determination of surface roughness and optical constants of inhomogeneous amorphous silicon films

R. Swanepoel · Journal of Physics E Scientific Instruments · 1984 · 721 citations

Natural Sciences, Materials Engineering, Materials Science +17

Silicon nitride single-layer x-ray mask

Misao Sekimoto, Hideo Yoshihara, Takashi Ohkubo · Journal of Vacuum Science and Technology · 1982 · 186 citations

Natural Sciences, Materials Engineering, Materials Science +17

An improved boron nitride technology for synchrotron x-ray masks

R. Lévy, Douglas J. Resnick, R. C. Frye et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 33 citations

Natural Sciences, Materials Engineering, Materials Science +10

Radiation stability of SiC and diamond membranes as potential x-ray lithography mask carriers

G Margaret Wells, Stuart Palmer, F. Cerrina et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1990 · 33 citations

Natural Sciences, Materials Engineering, Materials Science +15

Radiation damage effects in boron nitride mask membranes subjected to x-ray exposures

WS Johnson, R. Lévy, Douglas J. Resnick et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 30 citations

Engineering, Materials Engineering, Materials Science +15