Concepedia

The Effect of Wafer Shape on Slurry Film Thickness and Friction Coefficients in Chemical Mechanical Planarization

Joseph Lu, Jonathan Coppeta, Chris Rogers, Vincent P. Manno, Livia Racz, Ara Philipossian, Mansour Moinpour, Frank Kaufmanc

MRS Proceedings · 2000 · 17 citations · 11 references

Concepts

EngineeringChemical EngineeringMaterials ScienceMaterials ProcessingThin FilmsTribologySlurry RheologySurface RoughnessThin Film Mechanical PropertiesThin Film Surface MorphologyChemical Mechanical PlanarizationFilm ThicknessFrictionLubricant Film ThicknessPlanarizationPlanarization TechniquesSlurry Coating

References

11

Chemical processes in glass polishing

Lee M. Cook · Journal of Non-Crystalline Solids · 1990 · 989 citations

Natural Sciences, Chemistry, Materials Science +11

Dual emission laser induced fluorescence for direct planar scalar behavior measurements

Jonathan Coppeta, Chris Rogers · Experiments in Fluids · 1998 · 281 citations

Natural Sciences, Physics, Optics +11

Tribology Analysis of Chemical‐Mechanical Polishing

Scott R. Runnels, L. Michael Eyman · Journal of The Electrochemical Society · 1994 · 246 citations

Engineering, Materials Engineering, Materials Science +13

Feature‐Scale Fluid‐Based Erosion Modeling for Chemical‐Mechanical Polishing

Scott R. Runnels · Journal of The Electrochemical Society · 1994 · 169 citations

Natural Sciences, Materials Engineering, Materials Science +17

Contact Mechanics and Lubrication Hydrodynamics of Chemical Mechanical Polishing

John Tichy, Joseph A. Levert, Lei Shan et al. · Journal of The Electrochemical Society · 1999 · 152 citations

Engineering, Chemical Engineering, Materials Science +17