Concepedia

Joseph A. Levert

JA

5

Publications

344

Citations

5

H-Index

1998

Active since

Affiliations

Georgia Institute of Technology(Current)

Rensselaer Polytechnic Institute

Joseph A. Levert is an author at Georgia Institute of Technology specializing in mechanical engineering, engineering, and microfabrication.

Top concepts

EngineeringMaterial ScienceMicrofabricationMechanical EngineeringSurface PolishingApplied PhysicsSurface ScienceCorrosionMechanicsSolid Mechanics

Publications per year

1998–2009

5

Publications

5

Contact Mechanics and Lubrication Hydrodynamics of Chemical Mechanical Polishing

John Tichy, Joseph A. Levert, Lei Shan et al. · Journal of The Electrochemical Society · 1999 · 152 citations

Materials Science, Preliminary Model, Engineering +12

Interfacial Fluid Mechanics and Pressure Prediction in Chemical Mechanical Polishing

Lei Shan, Joseph A. Levert, L. E. Meade et al. · Journal of Tribology · 1999 · 90 citations

Chemical Mechanical Polishing/planarization, Engineering, Mechanical Engineering +18

Mechanisms of Chemical-Mechanical Polishing of SiO<sub>2</sub>Dielectric on Integrated Circuits

Joseph A. Levert, Francis McCarthy Mess, Richard F. Salant et al. · Tribology Transactions · 1998 · 59 citations

Chemical-mechanical Polishing, Engineering, Mechanical Engineering +16

Mechanism for Subambient Interfacial Pressures While Polishing With Liquids

Joseph A. Levert, S. Danyluk, John Tichy · Journal of Tribology · 1999 · 29 citations

Engineering, Mechanical Engineering, Subambient Pressures +20

CMP Friction as a Function of Slurry Silica Nanoparticle Concentration and Diameter

Joseph A. Levert, Chad S. Korach · Tribology Transactions · 2009 · 14 citations

Engineering, Mechanical Engineering, Nanotribology +16

Rows per page

1–5 of 5